北緯科技股份有限公司

維修

Repair

IOC / SIOC / EIOC Repair

IOC/SIOC/EIOC Repair

IOC / SIOC / EIOC Repair

北緯科技提供全方位的IOC、SIOC及EIOC控制器維修服務,擁有專業技術團隊及完整測試設備,確保每一個控制器都能達到原廠規格標準,延長設備使用壽命,降低客戶維護成本。

IOC Repair

Description OEM P/N
I/O Controller 27-10157-00
I/O Controller 27-262408-00

SIOC Repair

Description OEM P/N
HDSIOC 0 02-252395-00
HDSIOC 1 02-252396-00
HDSIOC 2 02-252397-00
HDSIOC E84 02-275644-00
WTS HV SIOC 0 02-123962-00
02-251408-00
WTS HV SIOC 1 02-123968-00
WTS HV SIOC 2 02-266872-00
WTS HV SIOC 3&4 02-123981-00
IXT PVD SIOC1 02-167050-00
02-258471-00
PVD IXT 0 02-272805-00
SESIOC WAFER HANDLE 02-168107-00
SESIOC WTS 1 02-264834-00
SIOC 2 MODULE 02-143079-00
SESIOC BATH NOVELLUS 02-168108-00
POST PLATE SESIOC 02-168110-00
Novellus 02-168112-00 SIOC 7 SESIOC 02-168112-00
SESIOC ANNEAL 4 NOVELLUS 02-168111-00
SIOC Anneal Controller Digital Dynamics 01-133875-00
SIOC Sabre 02-314969-00
SIOC ELECTROFILL MODULAR DRIVE 02-258901-00
Novellus 02-168109-00 SESIOC ELECTROFILL 02-168109-00
SIOC Anneal 02-168111-00

EIOC Repair

Description OEM P/N
E-HD4 ANNEAL SBR 02-286113-00
ASM,EHDSIOC 2 ENH MNT PLT SBR 02-392747-00
E-HD 5 SBU SBR-XT 02-370512-00
EHDSIOC 7SAC IRIS SBR-XT 02-370394-00
E-HDSIOC C3 ALTUS 0 02-354551-00
E-HD7 EXT EBR SBR-XT 02-351870-00
E-HD 3 POST PLT SBR-XT 02-351783-00
E-HDSIOC ALTUS 0 02-325957-00
ASM,E-HDSIOC ALTUS 2 CMPLT 02-360893-00
02-380738-00
E-HDSIOC E84 AWG 02-321482-00
E-HDSIOC GAMMA 0 XPRS 02-345069-00
EHD SIOC 1 GSBX FLX 02-361376-00
ASM,E-HD 1 BATH SBR-XT 02-351781-00
E-HDSIOC GAMMA 1 XPRS 02-345070-00
ASM, EHDSIOC 2 ENH MNT PLT SBR 02-392747-00
E-HD 3 POST PLT SBR-XT 02-351783-00
E-HD 2 PLT SBR-XT 02-351782-00
Excel CNTRLR,FLEX COMBO,EIOC 0,VXL SSM NA 61-393481-00
EIOC,785-179350-002 785-179350-002
EIOC,785-179350-002 02-396950-00
CNTRLR,EIOC0,TOP PLATE,AMPDS,VXL 61-410957-00
ASM,FE-HD EIOC 0 TOP PLT W/TC 02-390122-00
ASSY,EIOC1,G400 Gamma 02-361376-00
ASM,FE-HD EIOC PLATE SBR 3D 61-378381-00