維修

AMAT Dual Zone Ceramic Heater 300mm ,

P/N:0041-88254 (0010-63965)

TEL Trias CVD dep Ti/TiN 300mm

1.Heater Stage V2.5 E/L/MT3M87-073896-12 Emboss less SHT V2.5 for Ti chamber

2.HeaterAssy,Stage V2.5/MT3M87-082526-11 Emboss SHT V2.5 for SFD TiN & Normal TiN

AMAT Ceramic Heater PEALD, 300mm
P/N:0190-45322 (0010-56222)