IOC/ SIOC/ EIOC Repair

IOC Repair		EIOC Repair
Description	OEM P/N	Description	OEM P/N
I/O Controller	27-10157-00	E-HD4 ANNEAL SBR	02-286113-00
I/O Controller	27-262408-00	ASM,EHDSIOC 2 ENH MNT PLT SBR	02-392747-00
SIOC Repair		E-HD 5 SBU SBR-XT	02-370512-00
Description	OEM P/N	EHDSIOC 7SAC IRIS SBR-XT	02-370394-00
HDSIOC 0	02-252395-00	E-HDSIOC C3 ALTUS 0	02-354551-00
HDSIOC 1	02-252396-00	E-HD7 EXT EBR SBR-XT	02-351870-00
HDSIOC 2	02-252397-00	E-HD 3 POST PLT SBR-XT	02-351783-00
HDSIOC E84	02-275644-00	E-HDSIOC ALTUS 0	02-325957-00
WTS HV SIOC 0	02-123962-00 02-251408-00	ASM,E-HDSIOC ALTUS 2 CMPLT	02-360893-00 02-380738-00
WTS HV SIOC 1	02-123968-00	E-HDSIOC E84 AWG	02-321482-00
WTS HV SIOC 2	02-266872-00	E-HDSIOC GAMMA 0 XPRS	02-345069-00
WTS HV SIOC 3&4	02-123981-00	EHD SIOC 1 GSBX FLX	02-361376-00
IXT PVD SIOC1	02-167050-00 02-258471-00	ASM,E-HD 1 BATH SBR-XT	02-351781-00
PVD IXT 0	02-272805-00	E-HDSIOC GAMMA 1 XPRS	02-345070-00
SESIOC WAFER HANDLE	02-168107-00	ASM, EHDSIOC 2 ENH MNT PLT SBR	02-392747-00
SESIOC WTS 1	02-264834-00	E-HD 3 POST PLT SBR-XT	02-351783-00
SIOC 2 MODULE	02-143079-00	E-HD 2 PLT SBR-XT	02-351782-00
SESIOC BATH NOVELLUS	02-168108-00	Excel CNTRLR,FLEX COMBO,EIOC 0,VXL SSM NA	61-393481-00
POST PLATE SESIOC	02-168110-00	EIOC,785-179350-002	785-179350-002
Novellus 02-168112-00 SIOC 7 SESIOC	02-168112-00	EIOC,785-179350-002	02-396950-00
SESIOC ANNEAL 4 NOVELLUS	02-168111-00	CNTRLR,EIOC0,TOP PLATE,AMPDS,VXL	61-410957-00
SIOC Anneal Controller Digital Dynamics	01-133875-00	ASM,FE-HD EIOC 0 TOP PLT W/TC	02-390122-00
SIOC Sabre	02-314969-00	ASSY,EIOC1,G400 Gamma	02-361376-00
SIOC ELECTROFILL MODULAR DRIVE	02-258901-00	ASM,FE-HD EIOC PLATE SBR 3D	61-378381-00
Novellus 02-168109-00 SESIOC ELECTROFILL	02-168109-00
SIOC Anneal	02-168111-00

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