AMAT HDP
Cathode Base leak repair

AMAT-HDP
Gas ring repair

AMAT-HDP
Top coil repair

AMAT-HDP
Ground shield repair

AMAT-HDP
Top plate repair

AMAT-HDP
Top plate repair

Motion Controller
(REPAIR)
CDP2407-2

Slit Valve XGT300-30
(REPAIR)
60-151975-00

Slit Valve XGT310-30
(REPAIR)
60-313772-00

Pendulum Valve
(OVERHAUL)

VAT slit valve assy
(OVERHAUL)

SPINDLE, SEQ, FEERO,LOWER
(REPAIR)