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繁中
EN
About Us
About Us
Business Philosophy
Key Milestones
Awards & Certificates
Contact Us
Product & Technology
Equipment
Parts
Repair
ESG Section
Sustainable Operation
Social Responsibility
DEI Statement
Latest News
Latest News
Join Us
Friendly Workplace
Multi-faceted Learning
Talent Recruitment
EN
繁中
EN
Repair
Product & Technology
Repair
MKS 2L / 3L / 6L RPS Repair
Repair
Repair
Loadport overhaul Repair
IOC / SIOC / EIOC Repair
AMAT / TEL Ceramic Heater Overhaul
Valve / Indexer Controller Repair
MKS 2L / 3L / 6L RPS Repair
Valve Controller & Temp. Controller Repair
Upper & Lower spindle Repair
Brooks Robot Repair
Brooks Aligner Repair
EC1 / EC2 / MC3 / MC4 / MCT Repair
MKS 2L / 3L / 6L RPS Repair
2L
Description
OEM P/N
AX7650, AX7651
0920-00013
AX7657
0929-00013
3L
Description
OEM P/N
AX7670
0920-00100
6L
Description
OEM P/N
FI80131
0920-00057
FI80133
0920-01119
MKS ASTRONex RPS 6L
MKS ASTRON RPS 3L
MKS ASTRONex RPS 2L
